DPharp digital sensor
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Overview
DPharp digital sensor uses two single crystal silicon resonators vibrating at their natural frequencies. When pressure is applied, one of the resonators goes into tension, while the other goes into compression mode. The CPU directly counts the sensor output frequencies without any additional A/D conversion. Due to the excellent elastic properties of silicon material, the DPharp sensor exhibits greater linearity and repeatability, with no inherent hysteresis.
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Developed by
Yokogawa Electric Corporation