Lynx Handler
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Overview
The Adept Lynx Semi Handler combines a Lynx autonomous indoor vehicle (AIV) with a collaborative 4-axis robot to produce a highly versatile mobile robot designed to pick, place and move semiconductor waferpods throughout a wafer fab. It is designed to exchange wafer pods from a variety of processing equipment, stockers and storage (WIP) racks, and operates collaboratively within a fleet of Lynx vehicles.
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Developed by
Omron Corporation