Lynx Handler

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Overview

The Adept Lynx Semi Handler combines a Lynx autonomous indoor vehicle (AIV) with a collaborative 4-axis robot to produce a highly versatile mobile robot designed to pick, place and move semiconductor waferpods throughout a wafer fab. It is designed to exchange wafer pods from a variety of processing equipment, stockers and storage (WIP) racks, and operates collaboratively within a fleet of Lynx vehicles.

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Developed by

Omron Corporation
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Ian Seed
Author: Ian Seed
Created: 2014-05-23 Modified: 2020-07-03
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